Branched nozzle oblique angle flow for initiated chemical vapor deposition

Monomer precursor flow was introduced at an oblique angle to the substrate two locations during initiated chemical vapor deposition (iCVD) process using a branched nozzle inlet extension. The polymerization of methacrylic acid systematically studied as function length and monomer rate. Our experimental data showed evolution distinct symmetrical thickness profiles rate increased. maximum moved downstream along axes both nozzles Computational models were used study effects on velocity profile within reactor. Increasing resulted in increases ranges movement location local minimum associated with stagnation point. These provided insight for explaining trends found results. demonstrate ability use extension control polymer iCVD process.